Laser Cleaning Solutions Rau Kev Lag Luam Semiconductor

Raws li semiconductor thev naus laus zis txuas ntxiv zuj zus, cov khoom siv hluav taws xob sib xyaw ua ke tau hloov pauv los ntawm cov txheej txheem rau peb-seem. Cov txheej txheem tsim hluav taws xob sib xyaw ua ke tau dhau los ua ntau thiab nyuaj, feem ntau xav tau ntau pua lossis ntau txhiab tus txheej txheem. Rau cov khoom siv semiconductor siab heev, tom qab txhua txoj kev, yuav muaj ntau dua lossis tsawg dua cov pa phem, cov hlau seem lossis cov organic residues nyob rau saum npoo ntawm silicon wafer. Lub nruam shrinking ntawm cov cuab yeej feature qhov ntau thiab tsawg thiab cov complexity ntawm peb-dimensional ntaus qauv tau ua semiconductors li rhiab heev rau particle contamination, impurity concentration thiab kom muaj nuj nqis.

Cov kev xav tau siab dua tau muab tso rau pem hauv ntej rau kev siv thev naus laus zis ntawm cov khoom sib kis ntawm lub npog ntsej muag ntawm silicon wafers. Lub ntsiab lus tseem ceeb yog kom kov yeej lub zog adsorption loj ntawm cov kab mob thiab cov substrate. Tam sim no, ntau lub tuam txhab semiconductor siv cov kua qaub ntxuav. Kev ntxuav thiab phau ntawv so tsis yog tsuas yog siv tsis tau tab sis kuj ua rau muaj kuab paug thib ob. Yog li cas hom kev ntxuav tam sim no zoo dua rau kev ntxuav cov khoom semiconductor? Laser tu tam sim no yog ib txoj hauv kev zoo dua. Thaum lub laser scans dhau, tag nrho cov av ntawm cov khoom siv yuav raug tshem tawm, thiab cov av hauv qhov khoob yuav raug tshem tawm. Nws tuaj yeem raug tshem tawm yooj yim, yuav tsis khawb cov khoom nto, thiab yuav tsis ua rau muaj kuab paug thib ob. Nws yog kev xaiv nyab xeeb.

Tsis tas li ntawd, raws li qhov loj ntawm cov khoom siv hluav taws xob sib txuas txuas ntxiv zuj zus, cov khoom poob thiab qhov roughness ntawm qhov chaw thaum lub sij hawm ntxuav tau dhau los ua teeb meem uas yuav tsum tau them sai sai rau. Tshem tawm cov khoom tsis muaj cov khoom poob thiab cov qauv kev puas tsuaj yog qhov tseem ceeb tshaj plaws. Laser tu tshuab muaj kev sib cuag tshwj xeeb, tsis muaj thermal nyhuv, tsis muaj kev puas tsuaj rau qhov khoom yuav tsum tau ntxuav, thiab tsis muaj kuab paug theem nrab, uas yog incomparable zoo ntawm ib txwm tu txoj kev. Nws yog txoj kev tu zoo tshaj plaws los daws cov pa phem ntawm cov khoom siv semiconductor.